Scheduler, substrate processing apparatus, and substrate conveyance method

ABSTRACT

A calculation amount and calculation time for a substrate conveyance schedule are reduced. A scheduler is provided which is incorporated in a control section of a substrate processing apparatus including a plurality of substrate processing sections that process a substrate, a conveyance section that conveys the substrate, and the control section that controls the conveyance section and the substrate processing sections, and calculates a substrate conveyance schedule. The scheduler includes: a modeling section that models processing conditions, processing time and constraints of the substrate processing apparatus into nodes and edges using a graph network theory, prepares a graph network, and calculates a longest route length to each node; and a calculation section that calculates the substrate conveyance schedule based on the longest route length.

CROSS-REFERENCE TO RELATED APPLICATION

This application is based upon and claims benefit of priority from U.S.patent application Ser. No. 15/868,753, filed Jan. 11, 2018 which claimsbenefit of priority from Japanese Patent Application No. 2017-005729filed on Jan. 17, 2017, the entire contents of which are incorporatedherein by reference.

TECHNICAL FIELD

The present invention relates to a scheduler, a substrate processingapparatus, and a substrate conveyance method.

BACKGROUND ART

There are substrate processing apparatuses of various configurations.For example, generally, the substrate processing apparatus including asubstrate storage container that houses a plurality of substrates, aplurality of conveyers and a plurality of processing sections is known.In the substrate processing apparatus, the plurality of substrates aresuccessively fed from the substrate storage container into theapparatus, conveyed between the plurality of processing sections by theplurality of conveyers and processed in parallel, and the processedsubstrates are collected in the substrate storage container. Inaddition, the substrate processing apparatus including the plurality ofsubstrate storage containers that are made replaceable is also known. Insuch a substrate processing apparatus, by appropriately replacing thesubstrate storage container loaded with the processed substrates withthe substrate storage container loaded with unprocessed substrates, anoperation of the substrate processing apparatus can be continuouslyperformed.

As one example of the substrate processing apparatus described above, aplating apparatus that performs bump formation, TSV formation andrewiring plating is known, for example. In such a substrate processingapparatus, it is demanded to realize high throughput while satisfying astrict process constraint (a predetermined process time interval fromstart of a certain process to start of the next process). In order tosatisfy the strict demand, various scheduling methods for making anoptimum substrate conveyance plan have been considered for substrateconveyance control of the plating apparatus. The substrate processingapparatus that calculates a substrate conveyance schedule using asimulation method as the scheduling method is known (PTL 1).

CITATION LIST Patent Literature

PTL 1 Japanese Patent No. 5620680

SUMMARY OF INVENTION Technical Problem

In a case of calculating a substrate conveyance schedule using asimulation method, in order to obtain excellent throughput, simulationcalculation is performed respectively for combinations of manyparameters related to scheduling based on processing conditions andconstraints given in advance so that there is a problem that acalculation amount becomes huge and it is not suitable for an actualoperation as the substrate processing apparatus. As the solution, it isconceivable to search parameter setting by which a throughput valuebecomes maximum for a process recipe condition assumed at the point oftime of design and narrow down a parameter range assumed to be optimum.When executing actual substrate processing, substrate conveyancesimulation is performed for the respective parameters, evaluation valuesof the throughput are measured, and the parameter to be a maximumthroughput value is selected from them. In such a manner, by narrowingdown the parameter range assumed to be optimum from a group of manyexisting parameters, it is needed to shorten simulation calculation timein the actual operation and prevent substrate processing start frombeing obstructed.

However, in order to prepare the range that the simulation calculationtime when loaded on the apparatus is within the calculation time notobstructing the actual operation, which is the parameter range assumedto be optimum, calculation processing in advance of a long period oftime (five hours, for example) is needed. In addition, since theprepared parameter range assumed to be optimum is determined based onthe assumed process recipe condition, there is a problem that theexcellent throughput cannot be achieved in the case that the conditionother than the assumed process recipe condition is given or in the casethat the substrate processing apparatus is in a nonstationary state of afault or the like.

The present invention is implemented in consideration of theabove-described point. The object is to reduce a calculation amount andcalculation time for a substrate conveyance schedule and obtainexcellent throughput under any conditions.

Solution to Problem

According to a first aspect, a scheduler is provided which isincorporated in a control section of a substrate processing apparatusincluding a plurality of substrate processing sections that process asubstrate, a conveyance section that conveys the substrate, and thecontrol section that controls the conveyance section and the substrateprocessing sections, and calculates a substrate conveyance schedule. Thescheduler includes: a modeling section that models processingconditions, processing time and constraints of the substrate processingapparatus into nodes and edges using a graph network theory, prepares agraph network, and calculates a longest route length to each node; and acalculation section that calculates the substrate conveyance schedulebased on the longest route length.

According to the first aspect, the substrate conveyance schedule iscalculated based on the longest route length to each node modeled usingthe graph network theory. Therefore, the substrate conveyance schedulecan be calculated without performing advance calculation processing fornarrowing down a parameter range that conventionally needed a lot ofcalculation time so that a calculation amount and calculation time canbe reduced. In addition, since it is not needed to limit parameters(processing conditions) for obtaining optimum throughput beforehand, thesubstrate conveyance schedule capable of achieving the excellentthroughput even in the case that the condition other than the assumedprocess recipe is given can be calculated.

According to a second aspect, in the scheduler of the first aspect, thesubstrate processing section includes a plating section that performsplating on the substrate held by a substrate holder. The conveyancesection includes a preceding stage conveyance section that conveys thesubstrate between a substrate storage container housing the substrateand a fixing station attaching and detaching the substrate to/from thesubstrate holder, and a subsequent stage conveyance section that conveysthe substrate between the fixing station and the plating section. Thesubstrate processing apparatus includes an apparatus preceding stagesection including the preceding stage conveyance section and anapparatus subsequent stage section including the plating section and thesubsequent stage conveyance section. The modeling section models theprocessing conditions, the processing time and the constraints of theapparatus preceding stage section and the apparatus subsequent stagesection respectively, and separately prepares a preceding stage sidegraph network in the apparatus preceding stage section and a subsequentstage side graph network in the apparatus subsequent stage section. Thescheduler further includes a connecting section that performs processingof connecting the preceding stage side graph network and the subsequentstage side graph network and calculates the longest route length to eachnode. The calculation section calculates the substrate conveyanceschedule based on the longest route length to each node calculated inthe connecting section.

According to the second aspect, the processing conditions, theprocessing time and the constraints of the apparatus preceding stagesection and the apparatus subsequent stage section are modeledrespectively, the preceding stage side graph network in the apparatuspreceding stage section and the subsequent stage side graph network inthe apparatus subsequent stage section are separately prepared, and thenthe processing of connecting the respective networks is performed. Sincethe number of the nodes that connect the networks of the apparatuspreceding stage section and the apparatus subsequent stage section bythe edges is small compared to the number of the nodes of the entirenetwork, calculation is simplified compared to the case of calculatingthe graph network of the entire apparatus altogether, and thecalculation amount and the calculation time can be reduced.

According a third aspect, in the scheduler of the second aspect, thescheduler divides a specified processing number of the substrates intomini batches of an arbitrary number of the substrates. The modelingsection prepares the preceding stage side graph network for the minibatch and the subsequent stage side graph network for the mini batch.The connecting section connects the preceding stage side graph networkfor the mini batch and the subsequent stage side graph network for themini batch. The scheduler repeats preparation and connection of thepreceding stage side graph network for the mini batch and the subsequentstage side graph network for the mini batch as many times as thespecified processing number.

According to the third aspect, compared to the case of performingconnection after the graph networks of the preceding stage section andthe subsequent stage section are prepared for the entire specifiedprocessing number, calculation processing at the time of the connectioncan be reduced. In addition, by arbitrarily changing the number of thesubstrates in the mini batch according to the processing conditions, thecondition of short calculation time can be selected.

According to a fourth aspect, in the scheduler of any one of the firstto third aspects, a detection section that detects whether or not thesubstrate processing apparatus has shifted to a nonstationary state isprovided, the modeling section models the processing conditions, theprocessing time and the constraints of the substrate processingapparatus in the nonstationary state to the nodes and the edges usingthe graph network theory when the detection section detects that thesubstrate processing apparatus has shifted to the nonstationary state,prepares the graph network, and calculates the longest route length toeach node, and the calculation section is configured to calculate thesubstrate conveyance schedule based on the longest route length to eachnode in the nonstationary state.

According to the fourth aspect, even when the substrate processingapparatus shifts to the nonstationary state, since the substrateconveyance schedule is calculated based on the longest route length toeach node in the nonstationary state, the substrate conveyance scheduleappropriate in the nonstationary state can be calculated.

According to a fifth aspect, in the scheduler of the fourth aspect, thenonstationary state includes a state at the time of a fault of thesubstrate processing apparatus, a state at the time of maintenance of asubstrate holder, or a state at the time of maintenance of an anodeholder.

According to the fifth aspect, the appropriate substrate conveyanceschedule in a sudden nonstationary state such as the fault of thesubstrate processing apparatus can be calculated. In addition, thesubstrate holder and the anode holder sometimes need cleaning andinspections when used for a long period of time, and are maintained(cleaned or inspected) periodically by being taken out from thesubstrate processing apparatus or inside the substrate processingapparatus. According to the one aspect, even in the nonstationary statethat is periodically generated such as the maintenance, the appropriatesubstrate conveyance schedule can be calculated.

According to a sixth aspect, a substrate processing apparatus includingthe control section incorporating the scheduler of any one of the firstto fifth aspects is provided. In the substrate processing apparatus, thecontrol section is configured to control the conveyance section based onthe calculated substrate conveyance schedule.

According to the sixth aspect, the substrate can be appropriatelyconveyed based on the calculated substrate conveyance schedule.

According to a seventh aspect, a substrate conveyance method using asubstrate processing apparatus including a plurality of substrateprocessing sections that process a substrate, a conveyance section thatconveys the substrate, and a control section that controls theconveyance section and the substrate processing sections is provided.The substrate conveyance method includes: a modeling step of modelingprocessing conditions, processing time and constraints of the substrateprocessing apparatus into nodes and edges using a graph network theory,preparing a graph network, and calculating a longest route length toeach node; a calculation step of calculating a substrate conveyanceschedule based on the longest route length; and a step of conveying thesubstrate based on the substrate conveyance schedule.

According to the seventh aspect, the substrate conveyance schedule iscalculated based on the longest route length to each node modeled usingthe graph network theory. Therefore, the substrate conveyance schedulecan be calculated without performing advance calculation processing fornarrowing down a parameter range that conventionally needed a lot ofcalculation time so that the calculation amount and the calculation timecan be reduced. In addition, since it is not needed to limit parameters(processing conditions) for obtaining optimum throughput beforehand, thesubstrate conveyance schedule capable of achieving the excellentthroughput even in the case that the condition other than the assumedprocess recipe is given can be calculated.

According to an eighth aspect, in the substrate conveyance method of theseventh aspect, the substrate processing section includes a platingsection that performs plating on the substrate held by a substrateholder, the conveyance section includes a preceding stage conveyancesection that conveys the substrate between a substrate storage containerhousing the substrate and a fixing station attaching and detaching thesubstrate to/from the substrate holder, and a subsequent stageconveyance section that conveys the substrate between the fixing stationand the plating section, and the substrate processing apparatus includesan apparatus preceding stage section including the preceding stageconveyance section and an apparatus subsequent stage section includingthe plating section and the subsequent stage conveyance section. Themodeling step models the processing conditions, the processing time andthe constraints of the apparatus preceding stage section and theapparatus subsequent stage section respectively, and separately preparesa preceding stage side graph network in the apparatus preceding stagesection and a subsequent stage side graph network in the apparatussubsequent stage section. The substrate conveyance method furtherincludes a connecting step of performing processing of connecting thepreceding stage side graph network and the subsequent stage side graphnetwork and calculating the longest route length to each node. Thecalculation step calculates the substrate conveyance schedule based onthe longest route length calculated in the connecting step.

According to the eighth aspect, the processing conditions, theprocessing time and the constraints of the apparatus preceding stagesection and the apparatus subsequent stage section are modeledrespectively, the preceding stage side graph network in the apparatuspreceding stage section and the subsequent stage side graph network inthe apparatus subsequent stage section are separately calculated, andthe respective networks are connected thereafter. Since the number ofthe nodes that connect the networks of the apparatus preceding stagesection and the apparatus subsequent stage section by the edges is smallcompared to the number of the nodes of the entire network, thecalculation is simplified compared to the case of calculating thesubstrate conveyance schedule of the entire apparatus, and thecalculation amount and the calculation time can be reduced.

According to a ninth aspect, in the substrate conveyance method of theeighth aspect, the substrate conveyance method includes a step ofdividing a specified processing number of the substrates into minibatches of an arbitrary number of the substrates, the modeling stepprepares the preceding stage side graph network for the mini batch andthe subsequent stage side graph network for the mini batch, theconnecting step connects the preceding stage side graph network for themini batch and the subsequent stage side graph network for the minibatch, and the substrate conveyance method further includes a step ofrepeating preparation and connection of the preceding stage side graphnetwork for the mini batch and the subsequent stage side graph networkfor the mini batch as many times as the specified processing number.

According to the ninth aspect, compared to the case of performingconnection after the graph networks of the preceding stage section andthe subsequent stage section are prepared for the entire specifiedprocessing number, the calculation processing at the time of theconnection can be reduced. In addition, by arbitrarily changing thenumber of the substrates in mini batch according to the processingconditions, the condition of short calculation time can be selected.

According to a tenth aspect, in the substrate conveyance method of anyone of the seventh to ninth aspects, a step of detecting whether or notthe substrate processing apparatus has shifted to a nonstationary stateis provided, the modeling step includes a step of modeling theprocessing conditions, the processing time and the constraints of thesubstrate processing apparatus in the nonstationary state to the nodesand the edges using the graph network theory when it is detected thatthe substrate processing apparatus has shifted to the nonstationarystate, preparing the graph network, and calculating the longest routelength to each node, and the calculation step includes a step ofcalculating the substrate conveyance schedule based on the longest routelength to each node in the nonstationary state.

According to the tenth aspect, even when the substrate processingapparatus has shifted to the nonstationary state, since the substrateconveyance schedule is calculated based on the processing conditions,the processing time and the constraints, the substrate conveyanceschedule appropriate in the nonstationary state can be calculated.

According to an eleventh aspect, in the substrate conveyance method ofthe tenth aspect, the nonstationary state includes a state at the timeof a fault of the substrate processing apparatus, a state at the time ofmaintenance of a substrate holder, or a state at the time of maintenanceof an anode holder.

According to the eleventh aspect, the appropriate substrate conveyanceschedule in a sudden nonstationary state such as the fault of thesubstrate processing apparatus can be calculated. In addition, thesubstrate holder and the anode holder sometimes need cleaning andinspections when used for a long period of time, and are maintained(cleaned or inspected) periodically by being taken out from thesubstrate processing apparatus or inside the substrate processingapparatus. According to the one aspect, even in the nonstationary statethat is periodically generated such as the maintenance, the appropriatesubstrate conveyance schedule can be calculated.

Advantageous Effects of Invention

According to at least one aspect of the present invention, a calculationamount and calculation time for a substrate conveyance schedule can bereduced.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a schematic diagram illustrating a configuration example of aplating apparatus relating to an embodiment of the present invention;

FIG. 2 is a block diagram illustrating one example of a configuration ofa control section;

FIG. 3 is a block diagram of a substrate conveyance control schedulerillustrated in FIG. 2;

FIG. 4 is a diagram illustrating one example of a graph network modeledby a modeling section illustrated in FIG. 3;

FIG. 5 is a graph network diagram illustrated in FIG. 4, to which alongest route length to each node is added;

FIG. 6 is a diagram for which an edge for avoiding contention of aconveyer is added to the graph network diagram illustrated in FIG. 5;

FIG. 7 is a graph network diagram illustrated in FIG. 6, to which thelongest route length to each node is added;

FIG. 8 is a diagram illustrating a part of a substrate conveyanceschedule;

FIG. 9 is a diagram illustrating one example of conveyance processingtime of a loading robot set to the substrate conveyance controlscheduler;

FIG. 10 is a diagram illustrating one example of conveyance processingtime of a conveyer set to the substrate conveyance control scheduler;

FIG. 11 is a diagram illustrating one example of the conveyanceprocessing time of the conveyer set to the substrate conveyance controlscheduler;

FIG. 12 is a diagram illustrating one example of constraints set to thesubstrate conveyance control scheduler;

FIG. 13 is a diagram illustrating one example of an entire recipe set tothe substrate conveyance control scheduler;

FIG. 14 is a diagram illustrating one example of a process recipe set tothe substrate conveyance control scheduler;

FIG. 15 is a flowchart illustrating a substrate processing methodrelating to the present embodiment;

FIG. 16 is a flowchart illustrating subroutines of step S105;

FIG. 17 is a flowchart illustrating subroutines of step S203; and

FIG. 18 is a flowchart illustrating subroutines of step S204.

DESCRIPTION OF EMBODIMENTS

Hereinafter, an embodiment of the present invention will be describedwith reference to the drawings. In the drawings described below, samesigns are attached to same or corresponding components and redundantdescription is omitted. In the present embodiment, a substrateprocessing apparatus is described with a plating apparatus that performsplating on a semiconductor substrate as an example, but the substrateprocessing apparatus relating to the present invention is not limited tothe plating apparatus, and the present invention is applicable tovarious kinds of substrate processing apparatuses such as the substrateprocessing apparatus that performs processing for manufacturing an LCDto a glass substrate.

FIG. 1 is a schematic diagram illustrating a configuration example of aplating apparatus relating to the embodiment of the present invention.The present plating apparatus 10 includes a loading port 11, a loadingrobot 12, an aligner 13, a spin rinse dryer (SRD) 14, fixing stations 15a and 15 b, a substrate holder storage area 25 including a plurality ofstockers 16, a pre-washing bath 17, a preprocessing bath 18, a washingbath 19, a rough drying bath (blow bath) 20, a washing bath 21, aplating area 26 (corresponding to one example of a plating section)including a plurality of plating baths 22, and two conveyers 23 and 24.The spin rinse dryer 14, the pre-washing bath 17, the preprocessing bath18, the washing bath 19, the blow bath 20, the washing bath 21, and theplating baths 22 function as a substrate processing section thatperforms predetermined processing to a substrate. In addition, theloading robot 12 and the conveyers 23 and 24 function as a conveyancesection that conveys the substrate.

In FIG. 1, arrows A indicate a loading transfer stroke of the substrate,and arrows B indicate an unloading transfer stroke of the substrate. Onthe loading port 11, a substrate storage container (FOUP: Front OpeningUnified Pot) storing a plurality of unprocessed substrates and aplurality of processed substrates is mounted.

In the plating apparatus 10, the loading robot 12 takes out theunprocessed substrate from the substrate storage container mounted onthe loading port 11, and mounts it on the aligner 13. The aligner 13positions the substrate with a notch or an orientation flat or the likeas a reference. Then, the loading robot 12 transfers the substrate tothe fixing stations 15 a and 15 b, and the fixing stations 15 a and 15 bmounts the substrate on a substrate holder taken out from the stocker16. The plating apparatus 10 is configured to mount the substrate on therespective substrate holders in the two fixing stations 15 a and 15 band convey the two substrate holders as one set. The substrates mountedon the substrate holders are transferred to the pre-washing bath 17 bythe conveyer 23, pre-washed in the pre-washing bath 17, and thentransferred to the preprocessing bath 18. The substrate preprocessed inthe preprocessing bath 18 is transferred further to the washing bath 19,and washed in the washing bath 19.

The substrate washed in the washing bath 19 is transferred to one of theplating baths 22 in the plating area 26 by the conveyer 24, and immersedin plating liquid. Plating is executed here and a metal film is formedon the substrate. The substrate on which the metal film is formed istransferred to the washing bath 21 by the conveyer 24, and washed in thewashing bath 21. Subsequently, the substrate is transferred to the blowbath 20 by the conveyer 24, subjected to rough drying processing, thentransferred to the fixing stations 15 a and 15 b by the conveyer 23, anddetached from the substrate holder. The substrate detached from thesubstrate holder is transferred to the spin rinse dryer 14 by theloading robot 12, subjected to washing/drying processing, and thenstored at a predetermined position of the substrate storage containermounted on the loading port 11.

The plating apparatus 10 relating to the present embodiment is divided,for convenience, into an apparatus preceding stage section including theloading robot 12 (corresponding to one example of a preceding stageconveyance section) that conveys the substrate between the loading port11 and the fixing stations 15 a and 15 b, and an apparatus subsequentstage section including the conveyers 23 and 24 (corresponding to oneexample of a subsequent stage conveyance section) that conveys thesubstrate between the fixing stations 15 a and 15 b and the plating area26. In the plating apparatus 10 relating to the present embodiment, asdescribed later, a preceding stage side graph network in the apparatuspreceding stage section and a subsequent stage side graph network in theapparatus subsequent stage section are separately calculated.

Subsequently, a control section that controls the plating apparatus 10illustrated in FIG. 1 will be described. FIG. 2 is a block diagramillustrating one example of a configuration of the control section.Conveyance control of the loading transfer stroke of the substrateindicated by the arrows A by the loading robot 12, the conveyer 23 andthe conveyer 24 and conveyance control of the unloading transfer strokeof the substrate indicated by the arrows B, which are illustrated inFIG. 1, are performed by control of the control section.

The control section of the plating apparatus 10 includes an apparatuscomputer 30 and an apparatus controller 32. The apparatus computer 30mainly performs calculation and data processing or the like, and theapparatus controller 32 is configured to mainly control the respectivesections of the plating apparatus 10 illustrated in FIG. 1. In thepresent embodiment, the apparatus computer 30 and the apparatuscontroller 32 are separately configured, but without being limitedthereto, the apparatus computer 30 and the apparatus controller 32 maybe configured as an integrated control section.

The apparatus computer 30 includes an operation screen application 31that makes an operation screen be displayed at a non-illustrated displaysection, and a substrate conveyance control scheduler 40 for generatinga substrate conveyance control schedule. The apparatus computer 30includes, in addition, hardware such as a CPU (Central Processing Unit),a ROM (Read Only Memory), a memory and a hard disk needed for realizingthe operation screen application 31 and the substrate conveyance controlscheduler 40.

The apparatus controller 32 is network-connected with the apparatuscomputer 30, and is configured to receive a substrate conveyance controlschedule generated by the substrate conveyance control scheduler 40 fromthe apparatus computer 30. The apparatus controller 32 is connected withan operation device 50 including the conveyance section and thesubstrate processing section illustrated in FIG. 1 communicably throughan input/output interface. The apparatus controller 32 controls theoperation device 50 according to the substrate conveyance controlschedule received from the apparatus computer 30.

FIG. 3 is a block diagram of the substrate conveyance control scheduler40 illustrated in FIG. 2. As illustrated, the substrate conveyancecontrol scheduler 40 includes a modeling section 41, a calculationsection 42, a detection section 43, and a connecting section 44. Thesubstrate conveyance control scheduler 40 relating to the presentembodiment models processing conditions, processing time and constraintsof the plating apparatus 10 into nodes and edges using a graph networktheory to be described later, in order to calculate the substrateconveyance schedule. Here, the processing conditions include a kind andorder of processing, and a priority degree of the processing or thelike. The processing time includes start time of each process,conveyance start time, time needed for the process and time needed forconveyance or the like. In addition, the constraints are conditions thatconstrain the time needed from the start of certain processing to thestart of the next processing or the like. Note that a scheduler is anarithmetic processing unit including at least a storage medium havingsoftware for receiving signal information from outside and performing aseries of arithmetic processing of calculating the substrate conveyanceschedule based on it recorded thereon. Note that the scheduler furtherincludes a storage section for storing data information such as theprocessing time, the constraints and process recipes (processingconditions), and is configured to perform the above-described arithmeticprocessing while referring to the information preserved in the storagesection.

The modeling section 41 models the processing conditions, the processingtime and the constraints of the plating apparatus 10 into a graphnetwork expressed by the nodes and the edges using the graph networktheory, and calculates a longest route length to each node. Thecalculation section 42 calculates the substrate conveyance schedulebased on the longest route length to each modeled node. The detectionsection 43 receives a signal from the apparatus controller 32illustrated in FIG. 2, and detects whether or not the plating apparatus10 has shifted to a nonstationary state. Here, the nonstationary stateincludes a state at the time of a fault of the plating apparatus 10, astate at the time of maintenance of the substrate holder, or a state atthe time of maintenance of an anode holder or the like, for example.

In addition, in the present embodiment, the connecting section 44separately calculates the preceding stage side graph network in theapparatus preceding stage section and a subsequent stage side graphnetwork in the apparatus subsequent stage section, connects thepreceding stage side graph network and the subsequent stage side graphnetwork, and calculates the graph network relating to the entire platingapparatus 10.

Next, a specific example of calculating the substrate conveyanceschedule by the substrate conveyance control scheduler 40 illustrated inFIG. 3 will be described. FIG. 4 is a diagram illustrating one exampleof the graph network modeled by the modeling section 41 illustrated inFIG. 3. The graph network is simplified for the description.

Premises for modeling the graph network are as follows. That is, twosubstrate holders holding the substrate to be processed are used. Here,the respective substrate holders are referred to as a first substrateholder (Wafer Holder 1) and a second substrate holder (Wafer Holder 2).The plating apparatus 10 in this example includes four of a unit A, aunit B, a unit C and a unit D, and the processing is started from astate that the two substrate holders are stored in the respectivelydifferent unit A. For the units B and C, only one substrate holder canbe present. To the respective substrate holders, processing A-D to bethe nodes in FIG. 4 is executed. A conceivable order of the processingA-D executed to the respective substrate holders is predetermined basedon the process recipe, and the order is indicated by arrows of edgese1-e15 illustrated in FIG. 4. The processing A is takeout processing ofthe substrate holder from the unit A. The processing B is takeoutprocessing of the substrate holder from the unit B. The processing C istakeout processing of the substrate holder from the unit C. For theprocessing A, B and C, a series of the processing of takeout of thesubstrate holder, movement to the next unit and storage in the next unitare continuously executed, respectively. The processing D is storageprocessing of the substrate holder to the unit D. It is defined thattakeout processing time of the processing A-C is 5 seconds,respectively. The processing D is end processing, and the takeoutprocessing time is 0. The respective substrate holders are conveyed oneby one by one conveyer. For example, it is defined that moving time ofthe conveyer between the unit B and the unit C is 3 seconds. It isdefined that the moving time of the conveyer between the units B andbetween the units C is 1 second. To the substrate holder stored in theunit B, the processing of 15 seconds is performed, and to the substrateholder stored in the unit C, processing of 10 seconds is performed. Inaddition, as the constraints, the time from the start of the processingA to the start of the processing B is 40 seconds or shorter, and thetime from the start of the processing B to the start of the processing Cis 60 seconds or the like. A list of the premises is illustrated inTable 1 below.

TABLE 1 Processing list Processing content A Start to takeout from unitA B Start to takeout from unit B C Start to takeout from unit C DStorage in unit D (completion) Inter-unit moving time(s) Movingdestination A B C D Movement A 1 5 7 8 origin B 5 1 3 4 C 7 3 1 2 D 8 42 1 Takeout processing time(s) UNIT A 5 UNIT B 5 UNIT C 5 UNIT D 0Storage processing time(s) UNIT A 0 UNIT B 5 UNIT C 5 UNIT D 5 Recipeprocessing time(s) UNIT A 0 UNIT B 15 UNIT C 10 UNIT D 0 Constraintupper limit time(s) A → B 40 B → C 60 C → D 90

As illustrated in FIG. 4, required time from the processing A to theprocessing B regarding the first substrate holder is 5 seconds of thetakeout processing time from the unit A, 5 seconds of the moving time ofthe conveyor from the unit A to the unit B, 5 seconds of the storageprocessing time to the unit B and 15 seconds of the recipe processingtime in the unit B, and is 30 seconds as a total. Thus, the edge e1 is30 seconds. In addition, an edge e4 is 40 seconds as the constraint ofthe processing between the units A and B. The constraint here isexpressed by a negative number. It is similar between the units B and Cand between the units C and D. Regarding the first substrate holder, therequired time from the processing B to the processing C is 5 seconds ofthe takeout processing time from the unit B, 3 seconds of the movingtime of the conveyor from the unit B to the unit C, 5 seconds of thestorage processing time in the unit C and 10 seconds of the recipeprocessing time in the unit C, and an edge e2 is 23 seconds.

Subsequently, the required time from the processing C to the processingD regarding the first substrate holder is 5 seconds of the takeoutprocessing time from the unit C, 2 seconds of the moving time of theconveyor from the unit C to the unit D and 5 seconds of the storageprocessing time to the unit D, and is 12 seconds as the total. Thus, anedge e3 is 12 seconds. Regarding the second substrate holder, each ofthe required time from the processing A to the processing D is similarto that for the first substrate holder.

In the case of shifting from the processing B of the first substrateholder to the processing A of the second substrate holder, in order forthe second substrate holder to start the processing A (takeout from theunit A, movement to the unit B and storage), the unit B needs to befree. Therefore, the processing B of the first substrate holder needs tobe executed first. That is, 5 seconds of the takeout time from the unitB, 3 seconds of the moving time from the unit B to the unit C, and 5seconds of the storage processing time to the unit C are needed. Inaddition, since the processing B is performed last in the unit C and theprocessing A is performed in the unit A, 7 seconds of the time for theconveyor to move from the unit C to the unit A are needed. Therefore,the required time from the processing B of the first substrate holder tothe processing A of the second substrate holder is 20 seconds. Thus, anedge e13 is 20 seconds. An edge e14 is also similarly calculated, and is16 seconds. Since the recipe processing time of the unit D is 0 second,the edge e15 is 2 seconds of the moving time from the unit D to the unitC.

In a graph network diagram generated by the modeling section 41illustrated in FIG. 3 as described above, the longest route length toeach node is calculated. Here, the modeling section 41 uses a shortestroute problem solution approach in order to calculate the longest routelength. Specifically, the modeling section 41 inverts positive/negativeof a value of the required time of each edge, and a shortest route toeach node is calculated by the known shortest route problem solutionapproach such as Bellman-Ford algorithm. Here, for the shortest routefrom the processing A of the first substrate holder to the processing Cof the first substrate holder for example, the case of successivelyexecuting the processing A of the first substrate holder, the processingB of the first substrate holder and the processing C of the firstsubstrate holder is the shortest route (the value is minimum), and thevalue of the required time is “−53”. The modeling section 41 calculatesthe value of the shortest route length to each node in this way, andinverts the positive/negative of the value again. The value becomes thevalue indicating the longest route length to each node. The valueindicates the executable fastest processing start time of eachprocessing. Note that the longest route length to each node may becalculated using Dijkstra's algorithm for example, in addition to theBellman-Ford algorithm.

FIG. 5 is a graph network diagram illustrated in FIG. 4, to which thelongest route length to each node is added. Here, 53 seconds of thestart time of the processing C of the first substrate holder and 50seconds of the start time of the processing A of the second substrateholder are confirmed. When the processing A of the second substrateholder of the early start time is started, since the conveyer cannot beused until 5 seconds of the takeout processing, 5 seconds of movingprocessing from the unit A to the unit B and 5 seconds of storageprocessing to the unit B elapse, the processing C of the first substrateholder cannot be executed. In addition, unless 3 seconds of the movingtime from the last unit B of the processing A to the unit C at a startposition of the processing C elapse, the processing C of the firstsubstrate holder cannot be started. In order to avoid contention of theconveyer in this way, an edge e16 for example needs to be added newly asillustrated in FIG. 6. The edge e16 is 18 seconds as described above.FIG. 7 is a graph network diagram updated by calculating the longestroute length to each node again after adding the edge e16. Note that adirection of the edge corresponding to the edge e16 may be opposite, andin that case, an edge length is 20 seconds.

In the graph network diagram, in the case that a loop of a positivelength is generated by adding the edge, since the execution becomesimpossible (the constraint cannot be kept), it is needed to delete theadded edge and add a different edge. In an example in FIG. 7, the loopis present among the processing B of the first substrate holder, theprocessing A of the second substrate holder and the processing C of thefirst substrate holder, but there is no problem since the total lengthis 20+18−60=−22.

The longest route length to each node illustrated in FIG. 7 indicatesthe executable fastest processing start time of each processing.Therefore, when each processing is executed at the time indicated by thevalue of the longest route length, substrate conveyance processing ofhigh throughput can be performed.

The calculation section 42 prepares a timetable for conveying eachsubstrate holder, that is, the substrate conveyance schedule, based onthe value of the longest route length indicated in FIG. 7. FIG. 8 is adiagram illustrating a part of the substrate conveyance schedule. Thesubstrate conveyance control scheduler 40 transmits the substrateconveyance schedule prepared in this way to the apparatus controller 32illustrated in FIG. 2. The apparatus controller 32 controls thesubstrate processing section and the conveyance section based on thesubstrate conveyance schedule.

In this way, according to the substrate conveyance control scheduler 40relating to the present embodiment, the substrate conveyance schedule iscalculated based on the longest route length to each node regarding thenodes and the edges modeled using the graph network theory. Therefore,the substrate conveyance schedule can be calculated without performingadvance calculation processing for narrowing down a parameter range sothat the calculation amount and the calculation time can be reduced. Inaddition, since it is not needed to limit parameters (processingconditions) for obtaining the optimum throughput, the substrateconveyance schedule capable of achieving the excellent throughput evenin the case that the condition other than the assumed process recipe isgiven can be calculated.

Next, specific examples of the processing conditions, the processingtime and the constraints of the plating apparatus 10 set to thesubstrate conveyance control scheduler 40 will be described. FIG. 9 is adiagram illustrating one example of conveyance processing time of theloading robot 12 set to the substrate conveyance control scheduler 40.The diagram illustrates the time (seconds) needed for the loading robot12 to convey the substrate among the one substrate storage container(FOUP 1), the other substrate storage container (FOUP 2), and the spinrinse dryer 14 or the like. For example, the processing time of 1 secondis needed for the loading robot 12 to convey the substrate from the FOUP1 to the FOUP 2. As each required time illustrated in FIG. 9, the valuemeasured beforehand is set to the substrate conveyance control scheduler40.

FIG. 10 is a diagram illustrating one example of the conveyanceprocessing time of the conveyer 23 set to the substrate conveyancecontrol scheduler 40, and FIG. 11 is a diagram illustrating one exampleof the conveyance processing time of the conveyer 24 set to thesubstrate conveyance control scheduler 40. FIG. 10 illustrates the time(seconds) needed for the conveyer 23 to convey the substrate among thefixing stations 15 a and 15 b, the preprocessing bath 18 (Prewet), thewashing bath 19 (Presoak) and the blow bath 20 (Blow) or the like. Inaddition, FIG. 11 illustrates the time (seconds) needed for the conveyer24 to convey the substrate among the blow bath 20, one plating bath 22,and the other plating bath 22 or the like. Required moving time of eachconveyance section illustrated in FIG. 9 to FIG. 11 is set to thesubstrate conveyance control scheduler 40 beforehand as the processingtime.

Subsequently, the constraints set to the substrate conveyance controlscheduler 40 will be described. FIG. 12 is a diagram illustrating oneexample of the constraints set to the substrate conveyance controlscheduler 40. As illustrated, in this example, the constraints (seconds)of the preprocessing bath 18 (Prewet), the washing bath 19 (Presoak),the one plating bath 22 (Plating A), and the other plating bath 22(Plating B) or the like are illustrated. According to the constraintsillustrated in FIG. 12, for example, the conveyer 23 has to take out thesubstrate stored in the preprocessing bath 18 within 30 seconds afterpreprocessing is ended.

Next, the process recipes and the process processing time set to thesubstrate conveyance control scheduler 40 will be described. FIG. 13 isa diagram illustrating one example of an entire recipe set to thesubstrate conveyance control scheduler 40. As illustrated in FIG. 13,the plurality of process recipes are set to the substrate conveyancecontrol scheduler 40. In the illustrated example, recipe IDs “ABC” and“XYZ” are set. In the respective recipe IDs, unit recipes can beselected. In the illustrated example, in the recipe ID “ABC”, theprocessing in the preprocessing bath 18 (Prewet), the processing in theother plating bath 22 (Plating B), the processing in the blow bath 20(Blow), and the processing in the spin rinse dryer 14 (SRD) are set tobe performed under ordinary conditions (STD: Standard). In addition, inthe recipe ID “XYZ”, each illustrated processing is set to be performedunder a test condition (TEST).

FIG. 14 is a diagram illustrating one example of the process recipe setto the substrate conveyance control scheduler 40. As illustrated in FIG.14, the processing time for the ordinary condition (STD) and the testcondition (TEST) in the preprocessing bath 18 (Prewet), the washing bath19 (Presoak), the one plating bath 22 (Plating A), the other platingbath 22 (Plating B), the blow bath 20 (Blow), and the spin rinse dryer14 (SRD) is set respectively. The ordinary condition and the testcondition illustrated in FIG. 13 follow the processing time illustratedin FIG. 14.

Next, a substrate processing method by the plating apparatus 10 relatingto the present embodiment will be described. FIG. 15 is a flowchartillustrating the substrate processing method relating to the presentembodiment. As illustrated in FIG. 15, first, an operator sets theconveyance processing time of the substrate illustrated in FIG. 9 toFIG. 11 and the constraints illustrated in FIG. 12 to the platingapparatus 10, through a non-illustrated input section provided in theapparatus computer 30 of the plating apparatus 10 (step S101, stepS102). The processing time and the constraints in the nonstationarystate to be described later are stipulated in the plating apparatus 10beforehand according to situations of the nonstationary state such as akind of a fault.

Subsequently, whether or not new lot processing is instructed, that is,new substrate processing is instructed is determined (step S103). Whenthe new lot processing is instructed (step S103, YES), one of theprocess recipes (processing conditions) illustrated in FIG. 13 isselected, and the processing is started (step S104). Note that theselection of the process recipe may be inputted by the operator throughthe input section of the apparatus computer 30 or inputted from anon-illustrated host computer network-connected with the apparatuscomputer 30.

Next, the calculation section 42 of the substrate conveyance controlscheduler 40 calculates the substrate conveyance schedule (step S105). Adetailed process of step S105 will be described later. When thesubstrate conveyance schedule, that is, the timetable, is determined bystep S105, the apparatus controller 32 executes the substrate processing(step S106).

The detection section 43 detects whether or not the plating apparatus 10has shifted to the nonstationary state during the execution of thesubstrate processing (step S107). Here, the nonstationary state includesthe state at the time of a fault of the plating apparatus 10, the stateat the time of maintenance of the substrate holder, or the state at thetime of maintenance of the anode holder or the like. In the platingapparatus 10, a rectifier of the plating bath 22 or the like for examplesometimes fails suddenly, and one of the plating baths 22 becomesunusable in this case. In addition, the substrate holder and the anodeholder sometimes need cleaning and inspections when used for a longperiod of time, and are maintained (cleaned or inspected) periodicallyby being taken out from the plating apparatus 10 or inside the substrateprocessing apparatus. In this case, the usable substrate holder and thenumber of the substrate holders are changed, and the throughput of theplating apparatus 10 is affected. Therefore, in the case of determiningthat the plating apparatus 10 has shifted to the nonstationary state(step S107, YES), the processing returns to step S105, and the substrateconveyance schedule is calculated again based on the processingconditions, the processing time and the constraints in the nonstationarystate.

In the case of determining that the plating apparatus 10 has not shiftedto the nonstationary state (step S107, NO), whether or not all thesubstrates within a new lot have been processed is determined (stepS108). In the case that the substrate to be processed remains (stepS108, NO), the processing returns to step S107, and whether or not theplating apparatus 10 has shifted to the nonstationary state is detected.When all the substrates within the new lot are processed (step S108,YES), the processing of the new lot is ended (S109).

A specific calculation procedure of the substrate conveyance schedule instep S105 illustrated in FIG. 15 will be described. FIG. 16 is aflowchart illustrating subroutines of step S105. As illustrated, inorder to calculate the substrate conveyance schedule, first, the datasuch as the processing time illustrated in FIG. 9 to FIG. 11 and FIG.14, the constraints illustrated in FIG. 12 and the process recipes(processing conditions) illustrated in FIG. 13 is fetched to thesubstrate conveyance control scheduler 40 (step S201). Note that, whenit is detected that the plating apparatus 10 has shifted to thenonstationary state in step S107 in FIG. 15, in step S201, the data suchas the processing conditions, the processing time and the constraints ofthe plating apparatus 10 in the nonstationary state is fetched to thesubstrate conveyance control scheduler 40.

Subsequently, the substrate conveyance control scheduler 40 firstdivides a specified processing number of the substrates into some minibatches of every n substrates (n is an arbitrary number equal to orlarger than 1) (step S202). Thereafter, the substrate conveyance controlscheduler 40 calculates the graph network of the apparatus precedingstage section (step S203). Thereafter, the substrate conveyance controlscheduler 40 calculates the graph network of the apparatus subsequentstage section (step S204).

The connecting section 44 connects the graph network of the apparatuspreceding stage section calculated in step S203 and the graph network ofthe apparatus subsequent stage section calculated in step S204 as thegraph network as the entire apparatus, by adding the edge between therelated nodes (step S205). Next, when it is confirmed that thecalculation is finished for the entire specified processing number, andwhen the specified processing number is not reached (step S206, NO), thenext n substrates are added (step S207), and the processing returns tothe processing in step S203. When the specified processing number isreached (step S206, YES), the calculation section 42 calculates thesubstrate conveyance schedule based on the longest route length to eachnode in the graph network of the entire apparatus, and transmits thesubstrate conveyance schedule to the apparatus controller 32 illustratedin FIG. 2, as a substrate conveyance timetable (step S208). Theapparatus controller 32 controls the conveyance section of the platingapparatus 10 so as to convey the substrate based on the substrateconveyance timetable.

Subsequently, a specific calculation procedure of the substrateconveyance schedule of the apparatus preceding stage section in stepS203 illustrated in FIG. 16 will be described. FIG. 17 is a flowchartillustrating the subroutines of step S203. As illustrated, in order tocalculate the substrate conveyance schedule of the apparatus precedingstage section, first, the data such as the processing time, theconstraints and the process recipes (processing conditions) related tothe apparatus preceding stage section is fetched to the substrateconveyance control scheduler 40 (step S301). From the fetched data, aconveyance order of the apparatus preceding stage section is prepared(step S302). The conveyance order is prepared based on the processrecipes (processing conditions) in particular.

Subsequently, the modeling section 41 models the processing conditions,the processing time and the constraints into the nodes and the edgesusing the graph network theory, and generates the graph networkcorresponding to each substrate holder as illustrated in FIG. 4 (stepS303). When the graph network for the substrate holder of a mini batchprocessing number given in step S202 illustrated in FIG. 16 isadditionally generated (step S304, Yes), the longest route length toeach node is calculated based on the generated graph network (stepS305).

Next, a specific calculation procedure of the substrate conveyanceschedule of the apparatus subsequent stage section in step S204illustrated in FIG. 18 will be described. FIG. 18 is a flowchartillustrating subroutines of step S204. As illustrated, in order tocalculate the substrate conveyance schedule of the apparatus subsequentstage section, first, the substrate conveyance control scheduler 40acquires the data such as the processing time, the constraints and theprocess recipes (processing conditions) related to the apparatussubsequent stage section (step S401). From the fetched data, aconveyance order of the apparatus subsequent stage section is prepared(step S402). The conveyance order is prepared based on the processrecipes (processing conditions) in particular.

Subsequently, the modeling section 41 models the processing conditions,the processing time and the constraints into the nodes and the edgesusing the graph network theory, and generates the graph networkcorresponding to each substrate holder as illustrated in FIG. 4 (stepS403). When the graph network for the substrate holder of the mini batchprocessing number given in step S202 illustrated in FIG. 16 isadditionally generated (step S404, Yes), the longest route length toeach node is calculated based on the generated graph network (stepS405).

As described in FIG. 16, in the present embodiment, the processingconditions, the processing time and the constraints of the apparatuspreceding stage section and the apparatus subsequent stage section aremodeled respectively, and the preceding stage side substrate conveyanceschedule in the apparatus preceding stage section and the subsequentstage side substrate conveyance schedule in the apparatus subsequentstage section are separately calculated. Therefore, the calculation issimplified compared to the case of calculating the substrate conveyanceschedule of the entire apparatus, and the calculation amount and thecalculation time can be reduced. Note that the apparatus preceding stagesection and the apparatus subsequent stage section may be put togetherand the substrate conveyance schedule may be calculated at once.

In addition, according to the present embodiment, as illustrated in FIG.15, even when the plating apparatus 10 shifts to the nonstationarystate, since the substrate conveyance schedule is calculated based onthe processing conditions, the processing time and the constraints, thesubstrate conveyance schedule appropriate in the nonstationary state canbe calculated. Specifically, the appropriate substrate conveyanceschedule in a sudden nonstationary state such as the fault of theplating apparatus 10 can be calculated. In addition, even in thenonstationary state that periodically occurs such as the maintenance ofthe substrate holder and the anode holder, the appropriate substrateconveyance schedule can be calculated.

While the embodiment of the present invention is described above, theembodiment of the invention described above is intended to facilitateunderstanding of the present invention, and does not limit the presentinvention. It is apparent that the present invention may be modified orimproved without departing from the scope thereof, and the presentinvention includes equivalents thereof. Also, in the scope that at leastpart of the above-described problem can be solved or the scope that atleast part of effects is presented, each component described in thescope of claims and the description can be arbitrarily combined, oromitted.

REFERENCE SIGNS LIST

-   -   10 . . . Plating apparatus    -   11 . . . Loading port    -   12 . . . Loading robot    -   14 . . . Spin rinse dryer    -   15 a, 15 b . . . Fixing station    -   23 . . . Conveyer    -   24 . . . Conveyer    -   26 . . . Plating area    -   30 . . . Apparatus computer    -   31 . . . Operation screen application    -   32 . . . Apparatus controller    -   40 . . . Substrate conveyance control scheduler    -   41 . . . Modeling section    -   42 . . . Calculation section    -   43 . . . Detection section    -   44 . . . Connecting section    -   45 . . . Parameter adjustment section

What is claimed is:
 1. A scheduler incorporated in a control section ofa substrate processing apparatus including a plurality of substrateprocessing sections that process a substrate, a conveyance section thatconveys the substrate, and the control section that controls theconveyance section and the substrate processing sections, andcalculating a substrate conveyance schedule, the scheduler comprising: amodeling section that models processing conditions, processing time andconstraints of the substrate processing apparatus into nodes and edgesusing a graph network theory, prepares a graph network, and calculates alongest route length to each node; and a calculation section thatcalculates the substrate conveyance schedule based on the longest routelength, wherein the scheduler divides a specified processing number ofthe substrates into mini batches of an arbitrary number of thesubstrates, the modeling section prepares the graph network for the minibatch, and the scheduler adds an arbitrary number of the substrate fornext mini batch and repeats preparation of the graph network for thenext mini batch as many times as the specified processing number whenthe number of the substrate where the graph network has been prepared isnot reached to the specified processing number.
 2. The scheduleraccording to claim 1, comprising a detection section that detectswhether or not the substrate processing apparatus has shifted to anonstationary state, wherein the modeling section models the processingconditions, the processing time and the constraints of the substrateprocessing apparatus in the nonstationary state to the nodes and theedges using the graph network theory when the detection section detectsthat the substrate processing apparatus has shifted to the nonstationarystate, prepares the graph network, and calculates the longest routelength to each node, and wherein the calculation section is configuredto calculate the substrate conveyance schedule based on the longestroute length to each node in the nonstationary state.
 3. The scheduleraccording to claim 2, wherein the nonstationary state includes a stateat the time of a fault of the substrate processing apparatus, a state atthe time of maintenance of a substrate holder, or a state at the time ofmaintenance of an anode holder.
 4. A substrate processing apparatuscomprising the control section incorporating the scheduler according toclaim 1, wherein the control section is configured to control theconveyance section based on the calculated substrate conveyanceschedule.
 5. A substrate conveyance method using a substrate processingapparatus including a plurality of substrate processing sections thatprocess a substrate, a conveyance section that conveys the substrate,and a control section that controls the conveyance section and thesubstrate processing sections, the method comprising: a modeling step ofmodeling processing conditions, processing time and constraints of thesubstrate processing apparatus into nodes and edges using a graphnetwork theory, preparing a graph network, and calculating a longestroute length to each node; a calculation step of calculating a substrateconveyance schedule based on the longest route length; a step ofconveying the substrate based on the substrate conveyance schedule; anda step of dividing a specified processing number of the substrates intomini batches of an arbitrary number of the substrates, wherein themodeling step prepares the graph network for the mini batch, and thesubstrate conveyance method further includes a step of adding anarbitrary number of the substrate for next mini batch and repeatingpreparation of the graph network for the next mini batch as many timesas the specified processing number when the number of the substratewhere the graph network has been prepared is not reached to thespecified processing number.
 6. The substrate conveyance methodaccording to claim 5, comprising a step of detecting whether or not thesubstrate processing apparatus has shifted to a nonstationary state,wherein the modeling step includes a step of modeling the processingconditions, the processing time and the constraints of the substrateprocessing apparatus in the nonstationary state to the nodes and theedges using the graph network theory when it is detected that thesubstrate processing apparatus has shifted to the nonstationary state,preparing the graph network, and calculating the longest route length toeach node, and wherein the calculation step includes a step ofcalculating the substrate conveyance schedule based on the longest routelength to each node in the nonstationary state.
 7. The substrateconveyance method according to claim 6, wherein the nonstationary stateincludes a state at the time of a fault of the substrate processingapparatus, a state at the time of maintenance of a substrate holder, ora state at the time of maintenance of an anode holder.